Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 1018 2021年12月
A new technical method is developed for soft X-ray spectroscopy of near-edge x-ray absorption fine structure (NEXAFS). The measurement is performed with continuously rotating linearly polarized light over 2π, generated by a segmented undulator. A ...
In situ X-ray diffraction observation was done for neutron-irradiated and un-irradiated highly oriented pyrolytic graphite (HOPG) samples with synchrotron radiation to clarify the effect of irradiation-induced defects on the transformation to diam...
The effect of soft X-ray irradiation on hydrogenated silicon-containing diamond-like carbon (Si-DLC) films intended for outer space applications was investigated by using synchrotron radiation (SR). We found that the reduction in film thickness wa...
Akira Heya Tetsuo Harada Masahito Niibe Koji Sumitomo Takeo Watanabe
Proceedings of SPIE - The International Society for Optical Engineering 11908 2021年
An extreme ultraviolet (EUV) light with a wavelength of 13.5 nm has been introduced to 7 nm FinFET technology. Optical elements such as Mo/Si multilayer mirror in lithography equipment are contaminated with hydrocarbon during the EUV light irradia...
大学本部
高度産業科学技術研究所