DIAMOND AND RELATED MATERIALS 79(1) 14-20 2017年10月
The irradiation effect on fluorinated diamond-like carbon (F-DLC) film was investigated by measuring the dose dependence of various film properties using synchrotron radiation (SR) in the soft X-rays in the SR dose region from 0 to 2000 mA h. Film...
Shin-ichi Honda   Fumiya Ideno   Yasuji Muramatsu   Masahito Niibe   Mititaka Terasawa   Eric M. Gullikson   Kuei-Yi Lee   
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA 220 91-95 2017年10月
Low-energy Ar ions (0.5-2 keV) were irradiated onto vertically aligned multiwalled carbon nanotube (VA-MWCNT) films, and the chemical states, orientation, and oxygen content of the irradiated VA-MWCNT films were investigated by soft X-ray absorpti...
Al0.24Ga0.76N thin film surfaces were etched with CF4 plasma, with and without the assistance of near ultraviolet (UV) irradiation. The near-UV source was a black light lamp, which emitted wavelengths of 300-400 nm. The chemical compositions and m...
Hydrogenated amorphous silicon carbide films have been fabricated by the decomposition of hexamethyldisilane with a microwave discharge flow of Ar. Mechanically hard films were obtained by applying radio-frequency (RF) bias voltages to the substra...