Norihiro Sugano   Makoto Okada   Yuichi Haruyama   Shinji Matsui   
JAPANESE JOURNAL OF APPLIED PHYSICS 54(6) 2015年6月 [査読有り]
Room temperature (RT) nanoimprinting is an attractive technique for nanofabrication, because it is not required a thermal cycle or UV irradiation process. Previously, it has reported that RT-nanoimprinting enables the fabrication of nanostructures...