Kazuhiro Kanda   Hiroki Takamatsu   Eri Miura-Fujiwara   Hiroki Akasaka   Akihiro Saiga   Koji Tamada   
Japanese Journal of Applied Physics 57(4) 045501-045501 2018年4月 [査読有り]
The effects of soft X-ray irradiation on fluorinated diamond-like carbon (F-DLC) films were investigated using synchrotron radiation (SR). The Vickers hardness of the F-DLC films substantially increased from an initial value of about 290 to about ...