Ito Haruhiko   Kumakura Motoki   Suzuki Tsuneo   Niibe Masahito   Kanda Kazuhiro   Saitoh Hidetoshi   
Jpn. J. Appl. Phys. 55(6S2) 06HC01-06HC01 2016年6月 [査読有り]
Hydrogenated amorphous silicon carbide films have been fabricated by the decomposition of hexamethyldisilane with a microwave discharge flow of Ar. Mechanically hard films were obtained by applying radio-frequency (RF) bias voltages to the substra...