Sho Amano   Tomoaki Inoue   Shuji Miyamoto   
ELECTRONICS AND COMMUNICATIONS IN JAPAN 99(2) 3-9 2016年2月 [査読有り]
Micromachining of poly(tetrafluoroethylene) (Teflon) and poly(methyl methacrylate) (PMMA) samples was carried out using soft X-rays from a laser-produced Xe plasma source, which we developed. In the Teflon sample, the contact angle with a water dr...