Japanese Journal of Applied Physics 63(3) 038001-038001 2024年3月 [査読有り]
Abstract
In coherent X-ray diffraction imaging, speckles on a coherent diffraction pattern must be sampled at intervals sufficiently finer than the Nyquist interval, which imposes an upper limit on the sample size. To overcome the size limitatio...
<title>Abstract</title>The quest for understanding the structural mechanisms of material properties and biological cell functions has led to the active development of coherent diffraction imaging (CDI) and its variants in the hard X-ray regime. He...
Japanese Journal of Applied Physics 60(11) 118001-118001 2021年11月 [査読有り]
Abstract
The optical transfer function (OTF) of an inverse-phase composite zone plate under incoherent illumination was numerically evaluated by convoluting the point spread function (PSF) and transmission distribution of a model sample with gra...
A hard X-ray transmission imaging microscope has been in use at the beamline BL24XU of SPring-8. It makes use of a phase zone plate made of tantalum as its X-ray lens, and is capable of imaging the structure as fine as 125-nm line-and-space patter...
ANALYTICAL AND DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS, DEVICES, AND PROCESSES 2003(3) 467-475 2003年 [査読有り]
Using a highly parallel x-ray microbeam with a narrow angular divergence in both the vertical and the horizontal polarization directions of synchrotron radiation, we have demonstrated local minute strains of less than 10(-5) in semiconductor mater...