JAPANESE JOURNAL OF APPLIED PHYSICS 47(8) 6241-6246 2008年8月 [査読有り]
We have investigated the crystallinity of compositionally graded SiGe layers of strained Si (s-Si) wafers in the growth direction by irradiating, a synchrotron X-ray microbeam with a high parallelism on a cross section of s-Si wafers. As a result....
Journal of the Vacuum Society of Japan 51(5) 298-300 2008年 [査読有り]
A thin silicon nanooverlayer (SNOL) fabricated by oxidation and etch-back in a Separation by IMplantation of OXygen wafer was investigated by grazing incident X-ray diffraction at incident angles between 0.01° and 0.1° below the critical angle of ...
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 261(1-2) 634-638 2007年8月 [査読有り]
Using an X-ray reflectivity method we estimated the density of several Diamond-Like carbon (DLC) films. Those films were about 100-nm-thick and formed on Si substrates by Gas-Cluster Ion Beam assisted (GCIB), RF-plasma-CVD (RF), ECR-plasma-CVD (EC...
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY 62(6-7) 603-607 2007年7月 [査読有り]
Tornographic quantitative phase measurement has been carried out by using a hard X-ray micro-interferometer in Hyogo-ID at SPiing-8. The micro-interferometer combines an imaging microscope and a wavefront-div is i on- type interferometer by using ...
T. Kawamura S. Bhunia S. Fujikawa Y. Watanabe J. Matsui Y. Kagoshima Y. Tsusaka
Journal of Physics: Conference Series 83(1) 2007年6月 [査読有り]
Real-time observation of InP nanowire formation was performed using grazing incidence small angle x-ray scattering (GISAXS). Prior to the nanowire growth gold colloidal particles were spread on the substrate as the catalyst and annealed at 500 °C....
H Takano K Sumida H Hirotomo T Koyama S Ichimaru T Ohchi H Takenaka Y Kagoshima
Journal of Physics: Conference Series 849 012052-012052 2017年6月
We have improved the performance of a previously reported multilayer zone plate by reducing its outermost zone width, using the same multilayer materials (MoSi2 and Si) and fabrication technique. The focusing performance was evaluated at the BL24X...
XRM 2014: PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY 1696 2016年
Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi2 and Si layers alternately deposi...
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理学研究科