Japanese Journal of Applied Physics 63(3) 030902-030902 2024年3月
Abstract
A micromixer based on a surface acoustic wave (SAW) has attracted a great deal of attention because of their ability to mix liquids and multiphase flows with very high mixing efficiency. However, since microfluidic channels cloud only b...
We investigated the chemical composition of polytetrafluoroethylene (PTFE) under bending stress using hard X-ray photoelectron spectroscopy and soft X-ray absorption spectroscopy. Our measurements revealed the breaking of C–F bonds in the side cha...
Journal of Vacuum Science & Technology B 41(6) 2023年10月
We have completed a system that can achieve both deep x-ray lithography and submicron x-ray lithography with a single beamline by introducing the combination of x-ray plane and cylindrical mirrors. This x-ray lithography system can provide a large...
電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 127(2) 101 2007年2月