Akinobu Yamaguchi Masatoshi Takahashi Shunya Saegusa Yuichi Utsumi Tsunemasa Saiki
Japanese Journal of Applied Physics 63(3) 030902-030902 2024年3月
Abstract
A micromixer based on a surface acoustic wave (SAW) has attracted a great deal of attention because of their ability to mix liquids and multiphase flows with very high mixing efficiency. However, since microfluidic channels cloud only b...
We investigated the chemical composition of polytetrafluoroethylene (PTFE) under bending stress using hard X-ray photoelectron spectroscopy and soft X-ray absorption spectroscopy. Our measurements revealed the breaking of C–F bonds in the side cha...
Kanta Yamamoto Yuichi Utsumi Ikuya Sakurai Ikuo Okada Kenji Hanada Hidehiro Ishizawa Masahiro Takeo Taki Watanabe Sho Amano Satoru Suzuki Koji Sumitomo Akinobu Yamaguchi
Journal of Vacuum Science & Technology B 41(6) 2023年10月
We have completed a system that can achieve both deep x-ray lithography and submicron x-ray lithography with a single beamline by introducing the combination of x-ray plane and cylindrical mirrors. This x-ray lithography system can provide a large...
大学本部
高度産業科学技術研究所