Yuichi Haruyama   Daiki Morimoto   Akira Heya   Koji Sumitomo   Seigo Ito   Kumiko Yokota   Masahito Tagawa   
Japanese Journal of Applied Physics 60(12) 2021年12月 [査読有り]
The effect of atomic hydrogen exposure on hydrogenated amorphous carbon (a-C:H) films was investigated by X-ray photoelectron spectroscopy (XPS). From the dependence of the wide-scan XPS spectra of an a-C:H film on atomic hydrogen exposure, it was...