Chikako Sakai   Shunsuke Yamamoto   Ko Urushibata   Shohei Miki   Koji Arafune   Haruhiko Yoshida   Hyun Ju Lee   Atsushi Ogura   Yoshio Ohshita   Shin-ichi Satoh   
JAPANESE JOURNAL OF APPLIED PHYSICS 52(12) 122303 2013年12月 [査読有り]
We studied the structure of ozone-based atomic layer deposited aluminium oxide (AIO(x)) films as a passivation layer for p-type crystalline silicon (c-Si) solar cells and focused on the differences in the structure by the production conditions of ...